Journal
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES
Volume 29, Issue 2, Pages 261-267Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TCAPT.2006.875876
Keywords
carbon nanotubes (CNTs); enhanced thermal contact conductance; microwave plasma enhanced chemical vapor deposition (PECVD)
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Heat-conduction interfaces that employ carbon nanotube (CNT) arrays have been fabricated and studied experimentally using a reference calorimeter testing rig in a vacuum environment with infrared temperature measurements. Arrays of multiwalled CNTs are grown directly on silicon substrates with microwave plasma-enhanced chemical vapor deposition. Iron and nickel were used as CNT catalysts. CNT arrays grown under different synthesis conditions exhibit different pressure-contact conductance characteristics. The thermal contact resistance of CNTs with a copper interface exhibits promising results with a minimum value of 19.8 mm(2) K/W at a pressure of 0.445 MPa.
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