Use of an electron-beam evaporator for the creation of nanostructured pits in an insulating surface

We demonstrate a method for creating monatomic-depth rectangular pits of controlled size in an alkali halide surface by using an electron-beam evaporator. Atomic resolution noncontact atomic force microscopy is used to characterize the structure and size distribution of the pits, with mean side lengths ranging from 6.5 to 20 nm. It is also demonstrated that metal nanoparticles can be used to nucleate the growth of pits, resulting in pits with metal nanoparticles inside. (c) 2006 American Institute of Physics.