Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume 45, Issue 24-28, Pages L711-L713Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.45.L711
Keywords
field electron emitter; focused-ion-beam chemical vapor deposition (FIB-CVD); three-dimensional (3-D) structure; diamond-like carbon (DLC); nano-tool
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We carried out the field-emission characterization of materials, such as diamond-like carbon (DLC), W, and Fe, deposited by focused-ion-beam chemical vapor deposition (FIB-CVD) to develop a field emitter to be used as a nano-tool for spot deposition. As a result, the threshold voltage of the field emission from the DLC was lower than those from the W and Fe. In addition, we measured the work functions of the se materials using photoelectron spectroscopy and found that DLC has a low work function. Furthermore, a field emitter with a DLC tip as a cold cathode was fabricated on a glass capillary, because it was found to be able to emit electrons from the DLC using a low voltage. We also confirmed that electrons were emitted from a DLC tip fabricated by FIB-CVD.
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