4.5 Article Proceedings Paper

Laser processing of polymer nanocomposite thin films

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 24, Issue 4, Pages 1618-1622

Publisher

A V S AMER INST PHYSICS
DOI: 10.1116/1.2167980

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Current biotechnology and sensor research has enhanced the drive to establish viable methods for depositing high-quality polymer thin films. In this research, thin films of poly(methyl methacrylate) (PMMA) were prepared by matrix-assisted pulsed-laser evaporation (MAPLE). Up to 2 wt % of carbon nanotubes were subsequently added to MAPLE target systems for deposition of polymer nanocomposite films. Targets were ablated using a 248 nm (KrF) laser at fluences ranging from 0.045 to 0.75 J/cm(2). In addition, polymer concentration in MAPLE targets was varied between 1 and 5 wt % relative to the matrix solvent, in this case toluene. Films were deposited on Si substrates at room temperature in an Ar atmosphere. Molecular-dynamics simulations of MAPLE were utilized for interpretation of experimental observations. Particularly, the ejection of large clusters consisting of both PMMA and toluene molecules was studied and related to the observed morphology of the deposited films. (c) 2006 American Vacuum Society.

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