Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

The hydrogened diamond like carbon film (DLCH) with 1 mu m thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I-D/I-G ratio fitted from visible Raman spectra and sp(2)/sp(3) ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp(2)/sp(3) ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The I-D/I-G, ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp(2)/sp(3) ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400 degrees C and without severe oxidation.