3D microstructural characterization of nickel superalloys via serial-sectioning using a dual beam FIB-SEM

Dual beam focused ion beam-scanning electron microscopes are well suited for characterizing micron and sub-micron size microstructural features in three dimensions via serial-sectioning procedures. Importantly, these commercially-available instruments can be used to collect morphological, crystallographic, and chemical information throughout a serial-sectioning experiment. Selected examples are shown to demonstrate these capabilities. (c) 2006 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.