Journal
NANOTECHNOLOGY
Volume 17, Issue 13, Pages 3264-3267Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/17/13/031
Keywords
-
Ask authors/readers for more resources
Nanopores fabricated in solid-state membranes have previously been used for the rapid electrical detection and characterization of single biopolymer molecules. Various methods for producing solid-state nanopores have been reported, but fabricating nanopores of desired sizes controllably is still challenging. Here we report a fabrication technique which uses a focused ion beam (FIB) system to engineer nanopores precisely. This technique provides visual feedback over the formation process. The present method can produce highly symmetrical nanopores with diameters smaller than similar to 5 nmand can be used to create an array of multiple nanopores simultaneously. In addition, nanopores produced using the focused ion beam sculpting technique can be tailored down to less than 1 nm in diameter using high-energy electron radiation.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available