Journal
SUPERCONDUCTOR SCIENCE & TECHNOLOGY
Volume 19, Issue 8, Pages 860-864Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0953-2048/19/8/030
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In order to integrate superconducting qubits with rapid-single-flux-quantum (RSFQ) control circuitry, it is necessary to develop a fabrication process that simultaneously fulfils the requirements of both elements: low critical current density, very low operating temperature ( tens of millikelvin) and reduced dissipation on the qubit side; high operation frequency, large stability margins, low dissipated power on the RSFQ side. For this purpose, VTT has developed a fabrication process based on Nb trilayer technology, which allows the on-chip integration of superconducting qubits and RSFQ circuits even at very low temperature. Here we present the characterization ( at 4.2 K) of the process from the point of view of the Josephson devices and show that they are suitable to build integrated superconducting qubits.
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