Development of a three-axis active vibration isolator using zero-power control

This paper presents the development of an active 3-degree-of-freedom (DoF) vibration isolation system using zero-power magnetic suspension. The developed system is capable to suppress direct disturbances and isolate ground vibrations of the 3-DoF motions, associated with vertical translational and rotational modes. Two categories of control strategy for the actuators are proposed, i.e., local control and mode control. The latter method allows to overcome limitations of the poor performances for rotational modes exhibited by the former. A mathematical model of the system is derived and each DoF motion is treated separately for the control system. It is demonstrated analytically that the infinite stiffness to static direct disturbances can be generated and the resonance peak due to floor vibration can effectively be suppressed for the system. Moreover, the experiments have been carried out to measure the static and dynamic responses of the isolation table to direct disturbances, and transmissibility characteristic of the isolator from the floor. The results indicate good vibration isolation and attenuation performances, and show the efficacy of the developed isolator for industrialization.