Si/TiOx/Pt/TaOx electrodes fabricated by sputtering for electrochemical ozone generation

We fabricated an electrode for electrochemical generation of ozone by sputtering. The vertical structure of the electrode was composed of silicon/titanium oxide/platinum/tantalum oxide (Si/TiOx/Pt/TaOx). The catalyst layer of the electrode was an insulator comprising only tantalum oxide. By using the electrode as the, anode and perchloric acid as the electrolyte solution, ozone generation was observed at a current density of ca. 40mA/cm(2) and above. According to the electrochemical measurement, the potential of the electrode was ca. 8 V [vs a saturated calomel electrode (SCE)] at a current density of ca. 40mA/cm(2), and it was higher than the potential of the Pt electrode. The electrode was efficient for the electrochemical generation of ozone because of its high electrode potential.