☆ 4.8 Article

Wafer-scale Ni imprint stamps for porous alumina membranes based on interference lithography

SMALL (2006)

Journal

SMALL

Volume 2, Issue 8-9, Pages 978-982

Publisher

WILEY-V C H VERLAG GMBH

DOI: 10.1002/smll.200600100

Keywords

alumina; anodization; electrodeposition; lithography; templates

Categories

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

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