4.6 Article Proceedings Paper

Strain-induced shift of phonon modes in Si1-xGex alloys

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 9, Issue 4-5, Pages 541-545

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2006.08.046

Keywords

Raman spectroscopy; Si1-xGex alloys; strain

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A theoretical approach to the lattice dynamics of Si1-xGex alloys within a valence force field framework is discussed. A modified Keating model, the anharmonic Keating, was employed to perform supercell calculations in order to investigate accurately the three Raman active optical phonon modes. Theoretical results on both relaxed and strained SiGe samples are shown. A detailed study of the biaxial strain-induced shift of phonon modes of epitaxial SiGe alloys has been performed in all the composition range. Furthermore, a comparison of experimental data with the model results on phonon strain shift coefficients will be also discussed. (C) 2006 Elsevier Ltd. All rights reserved.

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