Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 249, Issue -, Pages 723-725Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2006.03.126
Keywords
calcium phosphate; hydroxyapatite; RF magnetron sputtering; XPS; RBS
Ask authors/readers for more resources
The calcium phosphate thin films for medical applications require similar chemical properties as those of natural bone as well as a uniform surface without any defect, such as cracks and pinholes. In this study, the calcium phosphate thin films were fabricated using RF magnetron sputtering deposition technique at discharge power of 200 W, 300 W and 400 W. The target used for the deposition was sintered HAp. RBS analysis showed that the Ca/P ratio increased with the discharge power becaming close to that of Ca/P = 1.67 in ideal HAp. XPS analysis revealed the presence of pO(4)(3-) and OH- bonds in the calcium phosphate films fabricated. The chemical prop-4 erties of the calcium phosphate thin films were similar to those of ideal HAp. The AFM results revealed that the thin films prepared had a uniform surface. (c) 2006 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available