Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 130, Issue -, Pages 523-530Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.12.022
Keywords
Fourier transform spectroscopy; DRIE; KOH; lateral combdrive actuator; optical MEMS
Ask authors/readers for more resources
We present a miniaturized Fourier transform spectrometer implemented on a silicon optical bench platform. Both optical and opto-mechanical components of a Michelson interferometer, including a silicon beam splitter, micromirrors, MEMS actuators, and fiber U-grooves, are simultaneously fabricated by micromachining of the device layer of a silicon-on-insulator wafer. Our specialized bulk micromachining process combines the flexible definition capability of deep reactive ion etching with the good surface quality provided by anisotropic KOH wet etching. This integrated Fourier transform spectrometer has a measured spectral resolution of approximately 45 nm near 1500 nm wavelength. (c) 2005 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available