Journal
OPTICS EXPRESS
Volume 14, Issue 17, Pages 7943-7953Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.14.007943
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Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two-and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e. g., Brownian ratchets), and templates for photonic crystal devices (e. g., mirrors, collimators, superprisms).
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