Journal
MECHATRONICS
Volume 16, Issue 7, Pages 417-426Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.mechatronics.2006.03.005
Keywords
modelling; quadratic programming; parameter estimation; observers; real-time
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The piezo-actuated stages are composed of the piezoelectric actuator and the positioning, mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward. compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation. (C) 2006 Elsevier Ltd. All rights reserved.
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