Journal
APPLIED PHYSICS LETTERS
Volume 89, Issue 10, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2347112
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The authors demonstrate that optical interference lithography yields diamond photonic band gap (PBG) architectures with PBGs as large as 25% when the exposed photoresist is replicated with silicon. This process utilizes five linearly polarized beams propagating from the same half-space (umbrella configuration), a setup considerably simpler than the widely studied counterpropagating four-beam setup. Using the umbrella configuration, this diamond structure is also achieved by two or more exposures using fewer interfering laser beams. (c) 2006 American Institute of Physics.
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