4.4 Article Proceedings Paper

CrAlN coatings deposited by cathodic arc evaporation at different substrate bias

Journal

THIN SOLID FILMS
Volume 515, Issue 1, Pages 113-117

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.01.061

Keywords

hard coatings; nitrides; arc deposition; ion bombardment; wear

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CrAlN is a good candidate as an alternative to conventional CrN coatings especially for high temperature oxidation-resistance applications. Different CrAlN coatings were deposited on hardened steel substrates by cathodic arc evaporation (CAE) from chromium-aluminum targets in a reactive nitrogen atmosphere at negative substrate bias between -50 and -400V The negative substrate bias has important effects on the deposition growth rate and crystalline structure. All our coatings presented hardness higher than conventional CrN coatings. The friction coefficient against alumina and tungsten carbide balls was around 0.6. The sliding wear coefficient of the CrAlN coatings was very low while an important wear was observed in the balls before a measurable wear were produced in the coatings. This effect was more pronounced as the negative substrate bias was increased. (c) 2006 Elsevier B.V. All rights reserved.

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