Journal
DIAMOND AND RELATED MATERIALS
Volume 15, Issue 10, Pages 1614-1621Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2006.01.018
Keywords
diamond crystal; optical properties characterization; micro-optics; micro electromechanical systems (MEMS)
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We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to characterize the structural quality of such microstructures, particularly as regards the removal of residual damage created during the machining process. Three-dimensional microstructures in high quality single crystal diamond have many applications, ranging from integrated quantum-optical devices to micro-electromechanical assemblies. (c) 2006 Elsevier B.V. All rights reserved.
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