Journal
IEEE ELECTRON DEVICE LETTERS
Volume 27, Issue 10, Pages 805-807Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2006.882526
Keywords
CMOS integrated circuits; microelectromechanical devices; oscillators; resistance heating; resonators
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A method to integrate micromechanical frequency-determining elements along with the corresponding electromechanical transducers into a poly or single-crystal silicon film layer is demonstrated. A resistor dissipating several microwatt of power induces high-frequency resonant mechanical motion in a shallow-shell membrane. Transduction from the mechanical to the electrical domain is performed using implanted piezoresistors, which are sensitive to strain produced by resonant motion. Self-sustained oscillations at 10 MHz are demonstrated when the device is directly coupled to a high-impedance operational amplifier and a positive feedback loop. Finally, this letter discuss how the resonator and transducers may be incorporated into standard integrated-circuit technology.
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