Journal
OPTICS LETTERS
Volume 31, Issue 19, Pages 2855-2857Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.31.002855
Keywords
-
Categories
Ask authors/readers for more resources
Resolution of 90 nm was achieved with a research microscope simply by replacing the standard bright-field condenser with a homebuilt illumination system with a cardioid annular condenser. Diffraction gratings with 100 nm width lines as well as less than 100 mn size features of different-shaped objects were clearly visible on a calibrated microscope test slide. The resolution increase results from a known narrower diffraction pattern in coherent illumination for the annular aperture compared with the circular aperture. This explanation is supported by an excellent accord of calculated and measured diffraction patterns for a 50 mn radius disk. (c) 2006 Optical Society of America.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available