Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 118, Issue 1-2, Pages 249-254Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.04.054
Keywords
NO2 sensor; copper phthalocyanine; suspended gate field effect transistor; Kelvin probe; flip-chip technology
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NO2 sensitive suspended gate (SG) field effect transistors (FET) based on copper phthalocyanine (CuPc) thin layers have been produced and investigated. The sensor structure is a hybrid one. The SG includes the CuPc sensing layer deposited in an independent process by thermal evaporation on the gate electrode (Au/alumina wafer). The transducer (FET) platform realised in standard complementary-metal-oxide-semiconductor (CMOS) technology and containing several measuring and reference channels is mounted using the flip-chip technology over the gate structure. The sensing layers and the sensors are showing low detection limit (< 50 ppb) and good sensitivity (20-70 mV/concentration decade), selectivity and reproducibility. (c) 2006 Elsevier B.V. All rights reserved.
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