Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 118, Issue 1-2, Pages 135-141Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.04.020
Keywords
metal oxide thin films; InOx; gas sensors; ozone
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InOx thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude during the processes of photoreduction/oxidation. It was concluded that it is mainly the grain size variation that determines the sensitivity of InOx films against ozone. (c) 2006 Elsevier B.V. All rights reserved.
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