Journal
MICROELECTRONICS JOURNAL
Volume 37, Issue 11, Pages 1280-1284Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2006.07.023
Keywords
piezoelectric power generator; MEMS; composite cantilever; vibration; energy harvesting
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A MEMS-based energy harvesting device, micro piezoelectric power generator, is designed to convert ambient vibration energy to electrical power via piezoelectric effect. In this work, the generator structure of composite cantilever with nickel metal mass is devised. Micro-electronic-mechanical systems (MEMS) related techniques such as sol-gel, RIE dry etching, wet chemical etching, UV-LIGA are developed to fabricate the device and then its performance is measured on vibration testing setup. The investigation shows that the designed device is expected to resonantly operate in low-frequency environmental vibration through tailoring the structure dimension. Under the resonant operation with frequency of about 608 Hz, a first prototype of the generator result in about 0.89 V AC peak-peak voltage output to overcome germanium diode rectifier toward energy storage, and its power output is in microwatt level of 2.16 mu W. (c) 2006 Elsevier Ltd. All rights reserved.
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