Journal
SURFACE SCIENCE
Volume 600, Issue 21, Pages 4870-4877Publisher
ELSEVIER
DOI: 10.1016/j.susc.2006.08.008
Keywords
x-ray photoelectron spectroscopy; molecular beam epitaxy; metallic films; aluminum oxide; metal-oxide interfaces; surface chemical reactions
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X-ray photoelectron spectroscopy was applied to study the hydroxylation of alpha-Al2O3 (0001) surfaces and the stability of surface OH groups. The evolution of interfacial chemistry of the alpha-Al2O3 (0001) surfaces and metal/alpha-Al2O3 (0001) interfaces are well illustrate via modifications of the surface Ols spectra. Clean hydroxylated surfaces are obtained through water- and oxygen plasma treatment at room temperature. The surface OH groups of the hydroxylated surface are very sensitive to electron beam illumination, Ar+ sputtering, UHV heating, and adsorption of reactive metals. The transformation of a hydroxylated surface to an Al-terminated surface occurs by high temperature annealing or Al deposition. (c) 2006 Elsevier B.V. All rights reserved.
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