4.5 Article

Demonstration of ultraviolet 6H-SiC PIN avalanche photodiodes

Journal

IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 18, Issue 21-24, Pages 2508-2510

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2006.887211

Keywords

avalanche photodiode (APD); impact ionization; photodetector; silicon carbide; ultraviolet (UV)

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We report electrical and electrooptical characteristic of mesa-structure 6H-SiC PIN avalanche photodiodes. At a gain of 1000, the dark current density is 9.2 mu A/cm(2). The excess noise factor corresponds to a k value of similar to 0.1. In addition, peak resoponsivity of 80 mA/W was observed at 290 nm (external quantum efficiency of similar to 35%).

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