4.6 Article

Size and shape control of GaAs nanowires grown by metalorganic vapor phase epitaxy using tertiarybutylarsine

Journal

JOURNAL OF APPLIED PHYSICS
Volume 100, Issue 9, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.2364603

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Au-catalyzed self-assembly of GaAs nanowires on (111)B GaAs by metalorganic vapor phase epitaxy is reported between 375 and 500 degrees C, using tertiarybutylarsine and trimethylgallium in H-2. The nanowires are [111]B aligned and kink-free. Below 425 degrees C the nanowires have narrow base diameter distributions, closely matching the size (similar to 60 nm) of the Au nanoparticles at their tip (no tapering). Above 425 degrees C the nanowires show a hexagonal-based pyramidal shape with base edges normal to the < 211 > in-plane substrate directions and base diameters which increase exponentially with temperature, indicating a kinetics limited growth along the nanowire sidewalls. Activation energies in the range of similar to 20-23 kcal/mol were estimated for growth along both the sidewalls and the B direction. (c) 2006 American Institute of Physics.

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