Journal
OPTICAL ENGINEERING
Volume 45, Issue 11, Pages -Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.2387882
Keywords
interferometry; two-wavelength; phase shifting
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We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities. (c) 2006 Society of Photo-Optical Instrumentation Engineers.
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