Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 35, Issue 11, Pages 2009-2015Publisher
MINERALS METALS MATERIALS SOC
DOI: 10.1007/s11664-006-0307-6
Keywords
embedded capacitors; polymer-ceramic nanocomposites; bimodal; dielectric properties
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Polymer-ceramic nanocomposites are the major candidate dielectrics for embedded capacitors. Due to the poor adhesion and poor thermal stress reliability at high filler loadings, commercially available polymer-ceramic composites can only achieve a maximum dielectric constant of similar to 30. However, a high dielectric constant of similar to 50-200 is required to make the layout area small enough for embedding applications. In this work, we systematically studied the material formulations in order to obtain a high dielectric constant (kappa > 50) at the lowest ceramic filler loading. It was found that material design and processing were critical. By modifying the epoxy matrix with a chelating agent and using bimodal fillers and a proper amount of dispersing agent, dielectric constants >50 were obtained at moderate filler loadings.
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