Journal
APPLIED PHYSICS LETTERS
Volume 89, Issue 20, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2388864
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An organic vapor phase deposition (OVPD) tool has been developed and optimized for the deposition of pentacene thin films. Pentacene is grown with a good thickness uniformity, a good material consumption efficiency, and deposition rates up to 9.5 A/s. Top-contact transistors based on OVPD-grown pentacene show high mobilities (up to 1.35 cm(2)/V s) and excellent characteristics, even at high deposition rates. Elementary circuit blocks have also been produced using an OVPD-deposited pentacene film. A five-stage ring oscillator features a stage delay of 2.7 mu s at a supply voltage of 22 V. (c) 2006 American Institute of Physics.
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