Journal
OPTICS EXPRESS
Volume 14, Issue 24, Pages 11622-11630Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.14.011622
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A high efficiency broadband grating coupler for Silicon-On-Insulator waveguides was designed. The grating coupler is defined by locally adding a poly-Silicon layer on top of the existing waveguide layer structure prior to grating etching. Adding this poly-Silicon layer reshapes the grating structure which changes its diffraction properties. Coupling efficiencies as high as 78% at a wavelength of 1.55 mu m are calculated and the optical 3dB bandwidth of the device is about 85nm. The device layout is compatible with standard CMOS technology processing. (c) 2006 Optical Society of America.
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