Journal
JOURNAL OF ELECTROCERAMICS
Volume 17, Issue 2-4, Pages 487-494Publisher
SPRINGER
DOI: 10.1007/s10832-006-9337-y
Keywords
SrTiO3; microwave dielectric properties; tunable microwave applications; film strain
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Structural distortion of ferroelectric thin films caused by film strain has a strong impact on the microwave dielectric properties. SrTiO3 thin films epitaxially grown on (110) DyScO3 substrates using molecular beam epitaxy (MBE) are extremely strained (i.e., similar to 1% in-plane tensional strain) from 3.905 angstrom of bulk SrTiO3. The room temperature dielectric constant and its tuning of the films are observed to be 6000 and 75% with an electric field of 1 V/mu m, respectively. The control of strain in SrTiO3 provides a basis for room temperature tunable microwave applications by elevating its phase transition peak to room temperature. Also, a significant in-plane anisotropy in dielectric constant and tuning was observed in these SrTiO3 films. The observed in-plane anisotropic dielectric properties have been interpreted based on the phenomenological thermodynamics of film strain.
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