Journal
JOURNAL OF APPLIED PHYSICS
Volume 100, Issue 11, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2396716
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We report on a technique for the fabrication of ridge optical waveguides on top of beta-BaB2O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dB/cm at 532 nm, making them suitable for nonlinear- and electro-optical applications. (c) 2006 American Institute of Physics.
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