Journal
IEEE JOURNAL OF SOLID-STATE CIRCUITS
Volume 41, Issue 12, Pages 2983-2991Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSSC.2006.884864
Keywords
capacitive interface circuit; Delta-Sigma modulator; force-rebalanced feedback; micro-electromechanical systems (MEMS); micro-gravity accelerometer; quantization noise
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In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC) Delta Sigma CMOS interface circuit for the closed-loop operation of a lateral capacitive microgravity silicon-on-insulator (SOI) accelerometer is presented. The interface circuit is based on a front-end programmable reference-capacitorless SC charge amplifier and a back-end second-order SC Delta Sigma modulator. The accelerometer is fabricated through a dry-release high aspect-ratio reduced-gap process. By incorporating the low-Q transfer function of the microaccelerometer in a feedback loop, the system's dynamic range is improved by 20 dB, leading to a measured resolution of 4 mu g/root Hz and an output dynamic range of 95 dB at 20 Hz. The bias instability is 2 to 8 mu g for 12 hours. The chip is fabricated in the 0.5-mu m standard CMOS process with an area of 2.25 mm(2). The integrated circuit (IC) consumes 4.5 mW of power.
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