Journal
SURFACE & COATINGS TECHNOLOGY
Volume 201, Issue 6, Pages 3155-3162Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2006.06.034
Keywords
nano-indentation; ferroelectric ceramic; sol-gel; Young's modulus; hardness
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The crystallographic orientation of PZT films is related to the orientation of the substrate (electrode) and the process parameters. In this study, the PZT films are deposited by sol-gel on silicon substrate with different bottom electrodes: TiOx/Pt and LaNiO3. In terms of sol-gel process we have modified the precursor concentration and the type of solvent. All these parameters affect the crystallite orientation. Nano-indentation tests coupled with continuous stiffness measurements allowed to obtain the M-< hk1 >, elastic modulus and the hardness H-b < hk1 > of these films. From the present study and from the literature, it is clearly shown that the mechanical properties greatly depend on the crystalline orientation. A compilation of all the reported data allows us to propose the values of M <(hk1 >), and Hb <(hk1 >) for the three characteristic orientations (001), (111) and (110). (c) 2006 Elsevier B.V. All rights reserved.
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