4.4 Article

The effects of zinc acetate and zinc chloride precursors on the preferred crystalline orientation of ZnO and Al-doped ZnO thin films obtained by spray pyrolysis

Journal

THIN SOLID FILMS
Volume 515, Issue 4, Pages 1942-1949

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.07.152

Keywords

zinc oxide; spray pyrolysis; zinc chloride; X-ray diffraction

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The effects of Zn acetate or/and Zn chloride as ZnO precursors have been studied on the c-preferred orientations of pure ZnO and ZnO films doped with aluminium obtained by spray pyrolysis. We have used aluminium nitrate and aluminium chloride as precursors for aluminium doping. The experiment uses factorial designs to reveal possible interactive effects between the ZnO precursors, and the aluminium doping on the crystalline texture obtained. We have determined the conditions to obtain c-preferred orientated thin films using mixtures of both ZnO precursors. (c) 2006 Elsevier B.V. All rights reserved.

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