Journal
ELECTRONICS LETTERS
Volume 42, Issue 25, Pages 1454-1455Publisher
INST ENGINEERING TECHNOLOGY-IET
DOI: 10.1049/el:20063077
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The fabrication and characterisation of high-quality silicon membrane photonic crystals are reported. The etching process was carefully optimised to give holes with very smooth and vertical sidewalls, resulting in propagation, with a minimum loss of 4.1 +/- 0.9 dB/cm in a single line defect (W1) waveguide.
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