Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 119, Issue 2, Pages 466-474Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.01.032
Keywords
vapor phase chemical sensing; cantilever sensor array platform; target specific coating layer; optical measurement; selectivity; sensitivity
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We have developed a 2-D multiplexed cantilever array platform for high-throughput nanomechanical chemical sensing and analysis. After coating the cantilevers with alkane thiols having different functional end groups, we have performed vapor phase chemical sensing experiments with toluene and water vapor as targets. To overcome non-uniform responses caused by fabrication and imaging issues, the chemical response of each cantilever is self-calibrated using the thermal response of each cantilever. From these experiments, we could observe chemically induced nanoscale motion of cantilevers for various humidity or vapor concentration levels, and response differentiation with different functional end groups of thiols. (c) 2006 Elsevier B.V. All rights reserved.
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