BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11 unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3 mm length and 13 mu m separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73 pm/V at 1550 nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field. (c) 2006 American Institute of Physics.