Journal
JOURNAL OF APPLIED PHYSICS
Volume 100, Issue 12, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2349837
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A procedure for fabricating flexible forms of high electron mobility transistors (HEMTs) supported on plastic substrates is described. The process uses a combination of conventional top-down, wafer scale fabrication protocols to define a printable form of ultrathin, device quality multilayer AlGaN/GaN single crystalline microstructures-a so-called microstructured semiconductor ink-and soft-lithographic printing methods to effect their registered transfer to a plastic substrate. These procedures yield high performance, bendable HEMT arrays that are mechanically durable-ones with effective transconductances exceeding nearly all reported forms of printed thin-film transistors. (c) 2006 American Institute of Physics.
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