Nano-fabrication with metallic glass - an exotic material for nano-electromechanical systems

Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (Delta T-x = 95 K), very smooth surface (R-a = 0.2 nm) and high value of Vickers hardness (H-v = 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern similar to 12 nm), as well as by the imprint lithography technique (smallest feature similar to 34 nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two- or three-dimensional components for future nano-electromechanical systems.