Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume 46, Issue 4-7, Pages L113-L116Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.46.L113
Keywords
vanadium dioxide; optical constants; semiconductive-metallic phase transition; thermochromism; spectroscopic ellipsometry; rf magnetron sputtering
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The optical constants of vanadium dioxide (VO2) films were determined at visible and near-infrared wavelengths at various temperatures during a semiconductive-metallic phase transition by ellipsometric analysis with Lorentz-oscillator formulae. The reversible changes in optical constants against temperature due to thermochromism were observed at around 70 degrees C. The wavelength dispersions of the optical constants were well expressed by the sum of three oscillators and their oscillating energies were attributed to photon-excited transitions. The variation in band structure during the phase transition was monitored, and the relationship between the band structure and optical properties was discussed.
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