Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 133, Issue 2, Pages 283-287Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.06.035
Keywords
microphone; silicon micromachining; packaging; directional microphone
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This paper gives an overview of the development of Silicon microphones fabricated in a standard BiCMOS process line of Infineon. MEMS development results in reliable processes for high sensitivity poly-silicon membranes. Microphones with sensitivity up to -39 dB V/Pa at 2 V bias and a signal to noise ratio of up to 65 dB(A) are presented. The impact of packaging on the product design is described. As an example a directional microphone with cardioid response and backward noise suppression of 19 dB is described. (c) 2006 Elsevier B.V. All rights reserved.
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