Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 121, Issue 2, Pages 679-688Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.03.023
Keywords
integrated microfluidics; microhotplate; gas sensor; volatile organic compounds; water monitoring
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A polymer microfluidic system for monitoring of volatile organic compounds diluted in water is presented. The sensor platform employs silicon-based microhotplate gas sensors as active detection elements, using a silicon-in-plastic microfabrication technology to enable integration of individual sensor chips into a larger polymer microfluidic substrate. The fabrication process provides seamless fluidic and electrical interconnects between the silicon and polymer substrates. The chemical monitoring system is designed to sample a water source, extract solvent present within the aqueous sample into the vapor phase, and direct the solvent vapor past the integrated gas sensor for analysis. Design, fabrication, and characterization of a prototype system is described, and results from illustrative measurements performed using methanol, toluene, and 1,2-dichloroethane in water are presented. (c) 2006 Elsevier B.V. All rights reserved.
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