Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 134, Issue 1, Pages 27-36Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.05.022
Keywords
lab-on-chip; capacitive sensor; CMOS; direct-write assembly; microfluidic; packaging
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In this paper, we propose a laboratory-on-chip (LOC) integration technique based on a novel electro-fluidic implementation and packaging procedures for blood-based diagnostics. LOC-based diagnostic tool is a complex, hybrid system consisting of various electrical, fluidic, and biochemical components, connected electrically and through fluidic channels on a single platform. The microfluidic fabrication technique is based on a direct-write fabrication process (DWFP) while the conventional wire bonding makes needed electrical connections. The microelectronic parts of proposed LOC put forward a high precision capacitive sensor carried out in TSMC's 0.18 mu m CMOS process. Experimental results allow demonstrating the capability of the proposed DWFP to fabricate polymer-based microfluidics on top of CMOS chips for LOCs. In addition, the preliminary results of the proposed capacitive sensor show a sensitivity of 250 mV/fF with a noise level equivalent to less than 10 aF where the existing parasitic capacitances can be more than 150 fF (c) 2006 Elsevier B.V. All rights reserved.
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