Journal
OPTICS LETTERS
Volume 32, Issue 5, Pages 533-535Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.32.000533
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We demonstrate in-plane microfabricated Fabry-Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q =26963, FWHM 0.060 nm, finesse F= 489, free spectral range FSR = 81.7 nm, and DBR mirror reflectance R = 99.4%. Thermo-optic tuning over 6.7 nm is also demonstrated. (c) 2007 Optical Society of America.
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