Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 13, Issue 5-6, Pages 475-481Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00542-006-0184-1
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Manufacturing moulds in non-metallic tooling materials using non-conventional structuring techniques is explored for rapid and/or alternative tooling for hot-embossing of polymers. Some challenges and advantages of producing embossing tools by deep reactive ion etching in silicon and/or replica-casting in poly(dimethylsiloxane) and utilizing them in the replication process are highlighted.
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