4.6 Article Proceedings Paper

Characterization and modeling of multi-element electrostatic lens systems

Journal

RADIATION PHYSICS AND CHEMISTRY
Volume 76, Issue 3, Pages 593-598

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.radphyschem.2005.11.037

Keywords

electrostatic lenses; zoom-lens properties; aberration coefficients; line shape; SIMION and LENSYS

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Electrostatic cylinder lenses Lire widely used to control beams of charged particles with different energies and directions in several fields, especially in electron spectroscopy. In this study, we investigated the zoom-lens properties of the three-, four- and five-element electrostatic lens systems as a function of the lens voltages and their dimensions. Lens systems, which consist of cylindrical electrodes, each spaced 0.1 diameter apart, were designed by using the SIMION and LENSYS programs. Three different lens configurations were studied to form an image at a specific position for use in experimental studies. We also discussed the line-shape profile of a three-element lens system as a function of the focusing voltage for einzel lens configuration. (C) 2006 Elsevier Ltd. All rights reserved.

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