☆ 4.8 Article

Formation of Boron-Based Films and Boron Nitride Layers by CVD of a Boron Ester

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (2011)

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Journal

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
Volume 50, Issue 16, Pages 3701-3705

Publisher

WILEY-BLACKWELL
DOI: 10.1002/anie.201003012

Keywords

boron; chemical vapor deposition; monolayers; nitrides; surface analysis

Categories

Chemistry, Multidisciplinary

Funding

  1. European Union [NMP4-CT-2004-013817]

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