4.4 Article Proceedings Paper

STW gas sensors using plasma-polymerized allylamine

Journal

THIN SOLID FILMS
Volume 515, Issue 9, Pages 4105-4110

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.02.041

Keywords

plasma-polymerization; gas sensor; sensor; STW; surface transverse wave; sensitivity; humidity

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Gas sensors generally consist of two major components: a gas recognition element which provides the specificity and selectivity of the measurement and a physical transducer which translates the gas absorption or desorption event into electronic signal. In this paper, plasma polymerized allylamine (PPAa) film is used as a gas recognition element and a surface transverse wave (STW) device is used as a physical transducer. It is confirmed that STW sensor devices coated with PPAa films provide high sensitivity for moisture. The STW sensor device with a 63 nm PPAa film provided twenty four times higher sensitivity than that of a non-coated STW device. In addition, the chemical structure of PPAa films is characterized by the FT-IR and the contact angle measurement. (c) 2006 Elsevier B.V. All rights reserved.

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